Limtrakarn W. Thermal Damage Improvement of Slider Fixture in Ion Mill Heatless Etching Process by FEM. Sci Tech Asia [internet]. 2015 Oct. 20 [cited 2025 Apr. 6];17(3):20-6. available from: https://ph02.tci-thaijo.org/index.php/SciTechAsia/article/view/41172