PHAISALPANUMAS, P.; SUZUKI, K.; KHAJORNRUNGRUANG, P.; KIMURA, K. Study on Variable Rotation Polishing Method in Chemical Mechanical Polishing Process. Applied Science and Engineering Progress, [S. l.], v. 7, n. 3, p. 35–42, 2014. Disponível em: https://ph02.tci-thaijo.org/index.php/ijast/article/view/67446. Acesso em: 4 mar. 2024.