Phaisalpanumas, Pipat, Keisuke Suzuki, Panart Khajornrungruang, and Keiichi Kimura. “Study on Variable Rotation Polishing Method in Chemical Mechanical Polishing Process”. Applied Science and Engineering Progress 7, no. 3 (July 16, 2014): 35–42. Accessed March 4, 2024. https://ph02.tci-thaijo.org/index.php/ijast/article/view/67446.