High-Speed Nanorobot Position Control Inside A Scanning Electron Microscope
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Published:
Jul 28, 2010
Keywords:
Electron microscope Nanorobot Control
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Abstract
Closed-loop nanorobot control performance is a key challenge on the way to high-throughput nanohandling. Currently, the limited update rate, long latency and unpredictable jitter of tracking based on scanning electron microscope images are a major bottleneck for such closed-loop control. A new approach for high-speed position sensing relying on line scans of a scanning electron microscope is adapted into the control loop of a mobile nanorobot. Several evaluation measurements show the system's unprecedented performance in terms of speed, resolution and accuracy. In only 60 ms, the employed mobile nanorobot can be positioned with a precision of 20nm in multiple degrees of freedom.
Article Details
How to Cite
Jasper, D., Diederichs, C., Edeler, C., & Fatikow, S. (2010). High-Speed Nanorobot Position Control Inside A Scanning Electron Microscope. ECTI Transactions on Electrical Engineering, Electronics, and Communications, 9(1), 177–186. https://doi.org/10.37936/ecti-eec.201191.172471
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Research Article
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References
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[3] T. Fukuda, M. Nakajima, P. Liu, and H. ElShimy, "Nanofabrication, Nanoinstrumentation and Nanoassembly by Nanorobotic Manipulation," Journal of Robotis Research, vol. 28, no. 4, pp. 537-547, 2009.
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[6] S. Fatikow, T. Wich, S. Kray, H. HÄulsen, T. sievers, M. JÄahnisch, and V. Eichhorn, "Automatic nanohandling station inside a scanning electron microscope," in 2nd Int. Conf. in Multi-Material Micro Manufacture (4M'06), Grenoble, France, September 2006, pp. 17-22.
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[8] T. Sievers and S. Fatikow, "Real-time object tracking for the robot-based nanohandling in a scanning electron microscope," Journal of Micromechatronics - Special Issue on Micro/Nanohandling, vol. 3, no. 3-4, pp. 267-284(18), 2006.
[9] T. Sievers, M. JÄahnisch, C. Schrader, and S. Fatikow, "Vision feedback in an automatic nanohandling station inside an SEM," in Proc. of 6th Int. Optomechatronics Conference on Visual/Optical Based Assembly and Packaging, SPIE's Optics East, 2006.
[10] T.Wortmann and S. Fatikow, "Carbon Nanotube Detection by Scanning Electron Microscopy," in Proc. of the Eleventh IAPR Conference on Machine Vision Applications (MVA), Yokohama, Japan, May 2009.
[11] C. Edeler, "Simulation and Experimental Evaluation of Laser-Structured Actuators for a Mobile Microrobot," in Proc. of IEEE Intl. Conference on Robotics and Automation (ICRA), Pasadena, CA, USA, May 2008, pp. 3118-3123.
[12] C. Edeler, D. Jasper, and S. Fatikow, "Development, Control and Evaluation of a Mobile Platform for Microrobots," in Proc. of the 17th IFAC World Congress, Seoul, Korea, July 2008, pp. 12739-12744.
[13] S. M. Martel, A. Saraswat, and I. W. Hunter, "Fundamentals of piezoceramic actuation for micrometer and submicrometer motions for the NanoWalker robot," Proc. of SPIE, vol. 4194, no. 1, pp. 82-93, 2000.
[14] S. Martel and I. Hunter, "Nanofactories based on a eet of scientific instruments configured as miniature autonomous robots," Jornal of Micromechatronics, vol. 2, no. 3-4, pp. 201-214, 2004.
[15] J. Brufau, M. Puig-Vidal, J. Lopez-Sanchez, J. Samitier, N. Snis, U. Simu, S. Johansson, W. Driesen, J.-M. Breguet, J. Gao, T. Velten,J. Seyfried, R. Estana, and H. Woern, "Micron: Small autonomous robot for cell manipulation applications," in Proc. of IEEE Int. Conference on Robotics and Automation (ICRA), Barcelona, Spain, April 2005, pp. 844-849.
[16] W. Driesen, T. Varidel, S. Regnier, and J.-M. Breguet, "Micro manipulation by adhesion with two collaborating mobile microrobots," Journal of Micromechanics and Microengineering, vol. 15, pp. 259-267, 2005.
[17] J.-M. Breguet, W. Driesen, F. Kaegi, and T. Cimprich, "Applications of piezo-actuated microrobots in micro-biology and material science," in International Conference on Mechatronics and Automation (ICMA), Heilongjiang, China, August 2007, pp. 57-62.
[18] R. Murthy, A. Das, and D. Popa, "ARRIpede: An Assembled Micro Crawler," in Proc. of 8th IEEE Conference on Nanotechnology (NANO'08), Arlington, TX, USA, August 2008, pp. 833-836.
[19] R. Murthy and D. Popa, "A Four Degree of Freedom Microrobot with Large Work Volume," in Proc. of IEEE Int. Conference on Robotics and Automation (ICRA), Kobe, Japan, May 2009, pp. 1028-1033.
[20] B. E. Kratochvil, L. Dong, and B. J. Nelson, "Real-time Rigid-body Visual Tracking in a Scanning Electron Microscope," The International Journal of Robotics Research, vol. 28, pp. 498-511, 2009.
[21] D. Jasper, "High-speed Position Tracking for Nanohandling inside Scanning Electron Microscopes," in Proc. of IEEE Intl. Conference on Robotics and Automation (ICRA), Kobe, Japan, May 2009, pp. 508-513.
[22] T. Luttermann, T. Wich, C. Stolle, and S. Fatikow, "Development of an Automated Desktop Station for EBiD-based Nano-Assembly," in Prof. of 2nd International Conference on Micro-Manufacturing (ICOMM), 2007, pp. 284-288.