Soft X-ray Spectroscopy on Titanium-based Decorative Coatings Prepared by Cathodic Arc Deposition

Abstract

The electronic structure of titanium-based decorative films such as titanium oxides, nitrides, carbides, and their mixtures was measured by soft X-ray photoemission and absorption spectroscopies. The titanium-based decorative films were deposited on a silicon wafer by the cathodic arc method with various gases at different flow rates resulting in diverse colors for decorative coatings to be applied to metal surfaces. However, it is difficult to control and characterize the coloration of titanium-based decorative films under various methods and conditions. In this study, the colorful titanium-based decorative films are analyzed in terms of elemental and chemical compositions to provide a fundamental principle of coloration for decorative coatings.