Crystallinity Effect on the Photocatalytic Performance of TiO2 Thin Films Prepared by CVD Process
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Published:
Jul 28, 2017
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Abstract
TiO2 thin films were synthesized by using chemical vapor deposition (CVD) process at 530°C to
examine the effect of CVD synthesis time on physical and optical properties, and photocatalytic
activities. Thin films of nano-sized spherical TiO2 particles were produced on borosilicate glass
substrates by the CVD process for 60 min and 90 min. As the synthesizing time increased, the particle
size of the TiO2 films increased, but the thicknesses of the films decreased. The band gaps of the films
prepared by deposition for 60 and 90 min were 3.51 and 3.25 eV, respectively. The photocatalytic
activities of the TiO2 thin films were monitored by studying the degradation of methylene blue under
simulated solar light irradiation. The rate constant of methylene blue decomposition was found to
increase from 4×10-4 to 6×10-4 min-1 when increasing the synthesis time from 60 min to 90 min. We
proposed that the crystallinity of TiO2 films is the main factor to enhance photocatalytic efficiency.
Article Details
How to Cite
(1)
Sakulsermsuk, S. Crystallinity Effect on the Photocatalytic Performance of TiO2 Thin Films Prepared by CVD Process. Microsc. Microanal. Res. 2017, 30, 1-5.
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Original Articles
References
1. O. Carp, C.L. Huisman, A. Reller, Photoinduced reactivity of
titanium dioxide, Prog. Solid State Chem., 2004, 32, 42-90.
2. X. Li, W. Zheng, G. He, R. Zhao, D. Liu, Morphology control
of TiO2 nanoparticle in microemulsion and its photocatalytic
property, ACS Sustainable Chem. Eng., 2014, 2, 288-295.
3. L. Ren, Y. Li, J. Hou, X. Zhao, C. Pan, Preparation and enhanced
photocatalytic activity of TiO2 nanocrystals with internal pores,
ACS Appl. Mater. Interfaces, 2014, 6, 1608-1615.
4. M. Krivec, K. Žagar, L. Suhadolnik, M. Čeh, G. Drazič, Highly
efficient TiO2 based microreactor for photocatalytic applications,
ACS Appl. Mater. Interfaces, 2013, 5, 9088-9094.
5. M. Covei, L. Predoana, P. Osiceanu, J.M.C. Moreno, M.
Anastasescu, S. Preda, M. Nicolescu, M. Gartner, M. Zaharescu,
Niobium/Vanadium doped TiO2 multilayered sol-gel films:
Structure, surface chemistry and optical properties, Ceram. Int.,
2016, 42 13805-13811.
6. M. Dutaa, S. Simeonov, V. Teodorescu, L. Predoana, S. Preda, M.
Nicolescu, A. Marin, D. Spasov, M. Gartner, M. Zaharescu, A.
Szekeres, Structural and electrical properties of Nb doped TiO2
films prepared by the sol–gel layer-by-layer technique, Mater.
Res. Bull., 2016, 74, 15-20.
7. Y.-J. Liou, P.-T. Hsiao, L.-C. Chen, Y.-Y. Chu, H. Teng, Structure
and electron-conducting ability of TiO2 films from electrophoretic
deposition and paste-coating for dye-sensitized solar cells, J.
Phys. Chem. C, 2011, 115, 25580-25589.
8. I. Gonzalo-Juan, A.J. Krejci, J.H. Dickerson, Toward dynamic
control over TiO2 nanocrystal monolayer by monolayer film
formation by electrophoretic deposition in nonpolar solvents,
Langmuir, 2012, 28, 5295-5301.
9. M. Hashizume, T. Kunitake, Preparation of self-supporting
ultrathin films of titania by spin coating, Langmuir, 2003, 19,
10172-10178.
10. D.Y. Lee, J.-T. Kim, J.-H. Park, Y.-H. Kim, I.-K. Lee, M.-H. Lee,
B.-Y. Kim, Effect of Er doping on optical band gap energy of
TiO2 thin films prepared by spin coating, Curr. Appl. Phys., 2013,
13, 1301-1305.
11. V. Bukauskas, S. Kaciulis, A. Mezzi, A. Mironas, G. Niaura, M.
Rudzikas, I. Šimkienė, A. Šetkus, Effect of substrate temperature
on the arrangement of ultra-thin TiO2 films grown by a dcmagnetron
sputtering deposition, Thin Solid Films, 2015, 585,
5–12.
12. S. Peng, Y. Yang, G. Li, J. Jiang, K. Jin, T.T. Yao, K. Zhang, X.
Cao, Y. Wang, G. Xu, Effect of N2 flow rate on the properties
of N doped TiO2 films deposited by DC coupled RF magnetron
sputtering, J. Alloy Compd. 2016, 678, 355-359.
13. M.Y. Song, S. Chin, J. Jurng, Y.-K. Park, One step simultaneous
synthesis of modified-CVD-made V2O5/TiO2 nanocomposite
particles, Ceram. Int., 2012, 38, 2613–2618.
14. S. Chaudhary, A. R. Head, R. Sanchez-de-Armas, H. Tissot, G.
Olivieri, F. Bournel, L. Montelius, L. Ye, F. Rochet, J.-J. Gallet,
B. Brena, J. Schnadt, Real-time study of CVD growth of silicon
oxide on rutile TiO2(110) using tetraethyl orthosilicate, J. Phys.
Chem. C., 2015, 119, 19149-19161.
15. H. Lee, M.Y. Song, J. Jurng, Y.-K. Park, The synthesis and
coating process of TiO2 nanoparticles using CVD process,
Powder Technol., 2011, 214, 64-68.
16. S. Yamauchi, Y. Imai, Plasma-assisted chemical vapor deposition
of TiO2 thin films for highly hydrophilic performance, Cryst.
Struct. Theory Appl., 2013, 2, 1-7.
17. K.-H. Ahn, Y.-B. Park, D.-W. Park, Kinetic and mechanistic
study on the chemical vapor deposition of titanium dioxide thin
films by in situ FT-IR using TTIP, Surf. Coat. Technol., 2003,
171, 198-204.
18. Z. Wang, S. Elouatik, G.P. Demopoulos, Understanding the
phase formation kinetics of non-crystalline kesterite deposited
on mesoscopic scaffolds via in situ multi-wavelength Ramanmonitored
annealing, Phys. Chem. Chem. Phys., 2016, 18,
29435-29446.
19. W. Thongsuwan, T. Kumpika, P. Singjai, Photocatalytic property
of colloidal TiO2 nanoparticles prepared by sparking process,
Curr. Appl. Phys., 2008, 8, 563-568.
20. I.O. Mazali, A.G. Souza Filho, B.C. Viana, J. Mendes Filho,
O.L.J. Alves, Size-controllable synthesis of nanosized-TiO2
anatase using porous Vycor glass as template, Nanopart. Res.,
2006, 8, 141.
21. A. Houas, H. Lachheb, M. Ksibi, E. Elaloui, C. Guillard, J.-M.
Herrmann, Photocatalytic degradation pathway of methylene
blue in water, Appl. Catal. B: Environ., 2001, 31, 145-157.
22. D.P. Macwan, P.N. Dave, S. Chaturvedi, A review on nano-TiO2
sol-gel type syntheses and its applications, J. Mater. Sci., 2011,
46, 3669-3686.
23. A. Fujishima, X. Zhang, Titanium dioxide photocatalysis: present
situation and future approaches, C. R. Chimie, 2006, 9, 750-760.
24. P. Chrysicopoulou, D. Davazoglou, Chr. Trapalis, G. Kordas, G.
Optical properties of very thin (<100 nm) sol-gel TiO2 films, Thin
Solid Films, 1998, 323, 188-193 (1998).
25. M. Sreemany, S. Sen, A simple spectrophotometric method for
determination of the optical constants and band gap energy of
multiple layer TiO2 thin films, Mater. Chem. Phys., 2004, 83,
169-177.
titanium dioxide, Prog. Solid State Chem., 2004, 32, 42-90.
2. X. Li, W. Zheng, G. He, R. Zhao, D. Liu, Morphology control
of TiO2 nanoparticle in microemulsion and its photocatalytic
property, ACS Sustainable Chem. Eng., 2014, 2, 288-295.
3. L. Ren, Y. Li, J. Hou, X. Zhao, C. Pan, Preparation and enhanced
photocatalytic activity of TiO2 nanocrystals with internal pores,
ACS Appl. Mater. Interfaces, 2014, 6, 1608-1615.
4. M. Krivec, K. Žagar, L. Suhadolnik, M. Čeh, G. Drazič, Highly
efficient TiO2 based microreactor for photocatalytic applications,
ACS Appl. Mater. Interfaces, 2013, 5, 9088-9094.
5. M. Covei, L. Predoana, P. Osiceanu, J.M.C. Moreno, M.
Anastasescu, S. Preda, M. Nicolescu, M. Gartner, M. Zaharescu,
Niobium/Vanadium doped TiO2 multilayered sol-gel films:
Structure, surface chemistry and optical properties, Ceram. Int.,
2016, 42 13805-13811.
6. M. Dutaa, S. Simeonov, V. Teodorescu, L. Predoana, S. Preda, M.
Nicolescu, A. Marin, D. Spasov, M. Gartner, M. Zaharescu, A.
Szekeres, Structural and electrical properties of Nb doped TiO2
films prepared by the sol–gel layer-by-layer technique, Mater.
Res. Bull., 2016, 74, 15-20.
7. Y.-J. Liou, P.-T. Hsiao, L.-C. Chen, Y.-Y. Chu, H. Teng, Structure
and electron-conducting ability of TiO2 films from electrophoretic
deposition and paste-coating for dye-sensitized solar cells, J.
Phys. Chem. C, 2011, 115, 25580-25589.
8. I. Gonzalo-Juan, A.J. Krejci, J.H. Dickerson, Toward dynamic
control over TiO2 nanocrystal monolayer by monolayer film
formation by electrophoretic deposition in nonpolar solvents,
Langmuir, 2012, 28, 5295-5301.
9. M. Hashizume, T. Kunitake, Preparation of self-supporting
ultrathin films of titania by spin coating, Langmuir, 2003, 19,
10172-10178.
10. D.Y. Lee, J.-T. Kim, J.-H. Park, Y.-H. Kim, I.-K. Lee, M.-H. Lee,
B.-Y. Kim, Effect of Er doping on optical band gap energy of
TiO2 thin films prepared by spin coating, Curr. Appl. Phys., 2013,
13, 1301-1305.
11. V. Bukauskas, S. Kaciulis, A. Mezzi, A. Mironas, G. Niaura, M.
Rudzikas, I. Šimkienė, A. Šetkus, Effect of substrate temperature
on the arrangement of ultra-thin TiO2 films grown by a dcmagnetron
sputtering deposition, Thin Solid Films, 2015, 585,
5–12.
12. S. Peng, Y. Yang, G. Li, J. Jiang, K. Jin, T.T. Yao, K. Zhang, X.
Cao, Y. Wang, G. Xu, Effect of N2 flow rate on the properties
of N doped TiO2 films deposited by DC coupled RF magnetron
sputtering, J. Alloy Compd. 2016, 678, 355-359.
13. M.Y. Song, S. Chin, J. Jurng, Y.-K. Park, One step simultaneous
synthesis of modified-CVD-made V2O5/TiO2 nanocomposite
particles, Ceram. Int., 2012, 38, 2613–2618.
14. S. Chaudhary, A. R. Head, R. Sanchez-de-Armas, H. Tissot, G.
Olivieri, F. Bournel, L. Montelius, L. Ye, F. Rochet, J.-J. Gallet,
B. Brena, J. Schnadt, Real-time study of CVD growth of silicon
oxide on rutile TiO2(110) using tetraethyl orthosilicate, J. Phys.
Chem. C., 2015, 119, 19149-19161.
15. H. Lee, M.Y. Song, J. Jurng, Y.-K. Park, The synthesis and
coating process of TiO2 nanoparticles using CVD process,
Powder Technol., 2011, 214, 64-68.
16. S. Yamauchi, Y. Imai, Plasma-assisted chemical vapor deposition
of TiO2 thin films for highly hydrophilic performance, Cryst.
Struct. Theory Appl., 2013, 2, 1-7.
17. K.-H. Ahn, Y.-B. Park, D.-W. Park, Kinetic and mechanistic
study on the chemical vapor deposition of titanium dioxide thin
films by in situ FT-IR using TTIP, Surf. Coat. Technol., 2003,
171, 198-204.
18. Z. Wang, S. Elouatik, G.P. Demopoulos, Understanding the
phase formation kinetics of non-crystalline kesterite deposited
on mesoscopic scaffolds via in situ multi-wavelength Ramanmonitored
annealing, Phys. Chem. Chem. Phys., 2016, 18,
29435-29446.
19. W. Thongsuwan, T. Kumpika, P. Singjai, Photocatalytic property
of colloidal TiO2 nanoparticles prepared by sparking process,
Curr. Appl. Phys., 2008, 8, 563-568.
20. I.O. Mazali, A.G. Souza Filho, B.C. Viana, J. Mendes Filho,
O.L.J. Alves, Size-controllable synthesis of nanosized-TiO2
anatase using porous Vycor glass as template, Nanopart. Res.,
2006, 8, 141.
21. A. Houas, H. Lachheb, M. Ksibi, E. Elaloui, C. Guillard, J.-M.
Herrmann, Photocatalytic degradation pathway of methylene
blue in water, Appl. Catal. B: Environ., 2001, 31, 145-157.
22. D.P. Macwan, P.N. Dave, S. Chaturvedi, A review on nano-TiO2
sol-gel type syntheses and its applications, J. Mater. Sci., 2011,
46, 3669-3686.
23. A. Fujishima, X. Zhang, Titanium dioxide photocatalysis: present
situation and future approaches, C. R. Chimie, 2006, 9, 750-760.
24. P. Chrysicopoulou, D. Davazoglou, Chr. Trapalis, G. Kordas, G.
Optical properties of very thin (<100 nm) sol-gel TiO2 films, Thin
Solid Films, 1998, 323, 188-193 (1998).
25. M. Sreemany, S. Sen, A simple spectrophotometric method for
determination of the optical constants and band gap energy of
multiple layer TiO2 thin films, Mater. Chem. Phys., 2004, 83,
169-177.