Structural and Electrical Properties of ZnO Prepared by RF Sputtering Technique

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Thawatchai Chanthong
Thanate Na Wichean
Weerawat Intaratat
Sakchai Phethchuai
Nattapong Thuedam


Zinc oxide (ZnO) thin film can be prepared by many techniques, one of the most popular techniques is the RF sputtering technique in which the researcher is interested in studying the structural and electrical properties of zinc oxide thin film with different coating times (15, 30, 45 and 60 min) on the glass substrate using RF sputtering technique in argon gas atmosphere. Structure study using X-ray diffraction (XRD) technique. It was found that every zinc oxide thin film with different coating times had hexagonal wurtzite crystal structure in the plane (002) at the angle of 2Θ, equal to 34.4๐ and the intensity of X-rays at the plane (002) increases as the time for coating increases. From the photos taken by the scanning electron microscopy (SEM) showed that the zinc oxide thin film. At increasing coating time, grain size increased with the coating time and this sample at 60 minutes coating time was the largest grain size and evenly distributed grain. And has the lowest electrical resistivity (2.68 Ω.m) which is measured by the four - points Van der Pauw technique. The results confirm that the crystal structure, grain size and electrical conductivity of the zinc oxide thin film synthesized by RF sputtering technique can improve the properties of the zinc oxide thin film by coating time.


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Lim, J. H., Kang, C. K., Kim, K. K., Park, I, K., Hwang, D. K., & Park, S. J. (2006). UV electroluminescence emission from ZnO light-emitting diodes grown by high-temperature radiofrequency sputtering. Advandce Material, 18(20), 2720–2724.

Son, N. T., Noh, J. S., & Park, S. (2016). Role of ZnO thin film in the vertical aligned growth of ZnO nanorods by chemical bath deposition. Applied Surface Science, 379, 440–445.

Alhadi, A., Zhi, Z., Gao, Y., Gao, S., Jiao, S., Wang, D., & Wang, J. (2018). Influence of different substrates on ZnO nanorod arrays properties. Solid State Sciences, 85, 21–25.

Pradhan, B., Batabyal, S. K., & Pal, A. J. (2007). Vertically aligned ZnO nanowire arrays in Rose Bengal-based dye-sensitized solar cells. Solar Energy & Solar cell, 91(9), 769–773.

Strano, V., Urso, R. G., Scuderi, M., Iwu, K, O., Simone, F., Ciliberto, E., Spinella, C., & Mirabella, S. (2014). Double role of HMTA in ZnO nanorods grown by chemical bath deposition. The Journal of Physical Chemistry C, 118(48), 28189–28195.

Ekem, N., Korkmaz, S., Pat, S., Balbag, M. Z., Cetin, E. N., & Ozmumcu, M.(2009). Some physical properties of ZnO thin films prepared by RF sputtering technique. International Journal of Hydrogen Energy, 34(12), 5218–5222.

Ammaih, Y., Lfakir, A., Hartiti, B., Ridah, A., Thevenin, P., & Siadat, M. (2014). Structural, optical and electrical properties of ZnO:Al thin films for optoelectronic applications. Optical and Quantum Electronics, 46(1), 229–234.

Dai, L.P., Deng, H., Mao, F. Y., & Zang, J. D. (2008). The recent advances of research on p-type ZnO thin film. Journal of Materials Science: Materials in Electronics, 19(8-9), 727–734.

Malik, G., Mourya, S., Jaiswal, J., & Chandra, R. (2019). Effect of annealing parameters on optoelectronic properties of highly ordered ZnO thin films. Materials Science in Semiconductor Processing, 100, 200–213.

Gerbreders, V., Sarajevs, P., Mihailova, I., & a Tamanis, E. (2015). The kinetic study of hydrothermal growth of ZnO nanorod array films. Latvian Journal of Physics and Technical Science, 52(5), 20–27.

Baradaran, M., Ghodsi, F. E., Bittencourt, C., & Llobet, E. (2019). The role of Al concentration on improving the photocatalytic performance of nanostructured ZnO/ZnO:Al/ZnO multilayerthin films. Journal of Alloys and Compounds, 788, 289–301.

Hjiri, M., Aida, M. S., Lemine, O. M., & El Mir, L. (2019). Study of defects in Li-doped ZnO thin films. Materials Science in Semiconductor Processing, 89, 149–153.

Khomchenco, V., Sopinskyy, M., Mazin, M., Danko, V., Lytvyn, O., & Piryatinskii, Y. (2019).The violet luminescence band in ZnO & ZnO-Ag thin films. Journal of Luminescence, 213, 519–524.

Islam, M. R., Rahman, M., Farhad, S. F. U., & Podder, J. (2019). Structural, optical and photocatalysis properties of sol-gel deposition Al-doped ZnO thin films. Surface and Interfaces. 16, 120–126.

Zheng, Z., Lin, J., Song, X., & Lin, Z. (2018). Optical properties of ZnO nanorod films prepared by CBD method. Chemical Physics Letters, 712, 155–159.

Ghayour, H., Rezaie, H. R., Mirdamadi, Sh., & Nourbakhsh, A. A. (2011). The effect of seed layer thickness on alignment and morphology of ZnO nanorods. Vacuum, 86(1), 101–105.