สมบัติทางแสงของฟิล์มบางเงินและฟิล์มบางเงินเจือที่เคลือบด้วย ดีซี อันบาลานซ์ แมกนีตรอน สปัตเตอริง

Abstract

Silver thin films possess many excellence optical properties and it is suitable for particularly energy applications. However, it easily degraded when exposed to the atmosphere. This paper present 

the results of the study on optical properties and themal emissivity of silver alloy thin films compared to Silver thin films possess many excellence optical properties and it is suitable for particularly energv applications. However, it easily degraded when exposed to the atmosphere. This paper presents the results of the study on optical properties and thermal emissivity of silver alloy thin films compared to that of pure silver. In addition, durability testing was also conducted. Thin films of pure silver and two systems of alloy including s;%Ag-s%Cu and gz.s%Ag-7.s%Cu with a thickness of about 2 - 20 nm were deposited on slide glasses by DC unbalanced Inagnetron sputtering. Spectral measurements using a UV-VIS-NIR spectrophotometer showed that both silver alloy films possess spectral response characteristics almost equal to pure silver. Their values of thermal emissivity were in the range of o.t-o,ti depending on film thickness. Durability testing of silver alloy films by annealing alloy films at 100"C in oxygen ambient showed no sign of deterioration of film properlies. As such, these alloy films coukl potentially serve as a reflective layer in the system of spectrally selective thin films. Furthermore, the filnt system based on these alloys would be more economical for producing a low-cost heat reflective minor