การเตรียมกระจกทำความสะอาดตัวเองด้วยเทคนิคสปัตเตอริงสำหรับกระจกเงาส่องหลังรถยนต์

Abstract

Titanium dioxide thin films (TiOr) have been deposited by reactive magnetron sputtering technique to studyphotocatalytic and hydrophilic property, for make a self cleaning glass. The films were deposited under different oxygen flow rate. The crystal structure was characterized by XRD, thickness and surface morphology were evaluated by AF'M. The photocatalyic and hydrophilic property was evaluated by the measurement of the decomposition of methylene blue and contact angle, respectively. The results showed that the deposited films have anatase phase. The films' thickness and roughness were influenced by the oxygen flow rate. The deposited films showed the photocatalytic and hydrophilic property when expose to the UV light.